TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare

Description

TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare
Inventory # A-18600
Part no: ADH
Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System
Installed Components
Parts List
Assembly Part No: 5087-401692-19 BASE(HP) ASSY,BACK
1 5010-101312-12 FRAME 1
2 5003-300048-11 BRACKET(R) 1
3 5010-405342-11 PLATE 1
4 5003-300047-11 BRACKET(L) 1
5 5010-405930-11 BRACKET 1
6 5010-405344-11 COLLAR 1
7 5010-306424-11 COVER 1
8 5010-407435-11 SEAL 2
9 5003-200013-11 DUCT(R) 1
10 5003-200012-11 DUCT(L) 1
11 5010-309775-11 PLATE 2
12 5003-300040-11 PORT 2
13 5010-309520-11 SHUTTER(R) 1
14 5010-309519-11 SHUTTER(L) 1
15 5010-404625-11 PLATE 2
16 5010-407356-11 BRACKET 2
17 5010-404632-11 SUPPORT,PIN 1
18 5010-405346-11 BRACKET 1
19 5010-405347-11 SEAL 1
20 5010-405348-11 SEAL 1
26 5010-406157-11 PLATE 1
27 5010-406155-11 PLATE 1
28 5010-406158-11 PLATE 1
29 5010-406156-11 PLATE 1
32 5010-407046-11 PLATE 2
33 5010-405582-11 PACKING 2
34 5086-403977-11 SENSOR,CYLINDER ADH U/D #02 1
35 5086-400794-11 SENSOR,PROXIMITY ADH #01 1
36 5086-401786-11 SENSOR,PROXIMITY ADH #02 1
37 5086-400797-12 SENSOR,THERMOSTAT LHP #01 1
39 5041-000236-11 CABLE ASSY 1746253-3(THERMO EXT #03) 1
101 5018-000014-11 LM GUIDE LS200118ALK1 2
102 020-006514-1 CAP SCREW CBSST6-12 1
103 5024-000080-11 AIR CYLINDER SSD-T1L2550-X09 1
104 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 2
105 028-003339-1 FITTING,TUBE M-5HL-6 2
106 026-007246-1 SPACER WSSS5-3-1 8
201 020-000005-1 CAP SCREW M3*6 SUS304 20
202 020-001091-1 CAP SCREW M4*16 SUS304 8
203 020-000518-1 CAP SCREW M3*4 SUS304 11
204 020-000012-1 CAP SCREW M3*12 SUS304 2
205 020-000057-1 CAP SCREW M5*12 SUS304 8
206 020-001167-1 CAP SCREW M5*10 SUS304 8
207 020-000090-1 CAP SCREW M6*20 SUS304 4
208 020-000030-1 CAP SCREW M4*8 SUS304 4
209 032-000024-1 FLAT WASHER M6 SUS304 POLISHED ROUND 1
210 026-102041-1 SET PLATE TM-147-1-5563 WASHER 2
211 020-000009-1 CAP SCREW M3*10 SUS304 4
212 020-000414-1 CAP SCREW M2*4 SUS304 2
213 020-001126-1 SET SCREW M4*5 SUS304 2
216 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 9
Assembly Part No: 5087-401608-12 PIN(ADH) ASSY
1 5010-305466-11 BASE,PIN 1
2 5010-311607-11 BRACKET 1
3 5010-404667-11 PLATE 1
4 5010-400930-11 COLLAR 1
5 5010-404577-11 ROD 1
6 5010-401163-11 PLATE 1
7 5010-307257-11 PLATE 1
8 5010-306713-11 BLOCK 1
9 5086-403976-11 SENSOR,CYLINDER ADH U/D #01 1
10 5003-400007-11 PIN(56) 3
101 026-005603-1 SPACER WSSS10-4-1 1
102 5024-000079-11 AIR CYLINDER SSD-T1L1623-X06 1
103 5018-000011-11 LM GUIDE LS150080CLK1 1
104 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 2
201 020-000028-1 CAP SCREW M4*6 SUS304 2
202 020-000510-1 CAP SCREW M2.6*10 SUS304 3
203 020-000032-1 CAP SCREW M4*10 SUS304 7
204 020-000642-1 CAP SCREW M3*55 SUS304 4
205 020-002059-1 SET SCREW M3*5 SUS304 2
206 020-000519-1 CAP SCREW M3*16 SUS304 2
207 020-000005-1 CAP SCREW M3*6 SUS304 2
208 020-001093-1 CAP SCREW M4*14 SUS304 2
209 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE 4
Assembly Part No: 5085-407303-12 SUPPORT(ADH) ASSY
1 5010-101307-11 RING(ADH),SUPPORT 1
2 2910-437210-11 PACKING 1
3 2910-420314-11 PACKING 1
4 2910-303824-13 SEAL 1
5 5010-203089-11 FLANGE 1
6 5010-305464-11 PLATE 1
7 5010-403103-11 PACKING 1
8 5010-405457-11 PLATE 2
101 028-002124-1 FITTING,TUBE F900-AT-6.35A 6
102 028-002197-1 FITTING,TUBE F900-H-6.35A 1
103 028-002257-1 FITTING,TUBE F900-L-6.35 5
104 028-002302-1 FITTING,TUBE F900-T-6.35 5
105 028-006637-1 FITTING,RESIN EUT1/4-C1 1
201 020-000057-1 CAP SCREW M5*12 SUS304 12
202 020-000020-1 CAP SCREW M3*20 SUS304 6
203 020-001089-1 CAP SCREW M3*14 SUS304 6
204 020-000028-1 CAP SCREW M4*6 SUS304 12
205 027-000431-1 O-RING BYTON AS568-251 BLACK 2
206 020-000030-1 CAP SCREW M4*8 SUS304 4
Assembly Part No: 5087-401362-16 BASE(E-ADH) ASSY
1 5010-306409-11 COVER 1
2 5010-308906-11 BRACKET 1
3 5010-202625-11 COVER 1
4 5010-404767-11 COVER 1
5 5010-404768-11 COVER 1
6 5010-405337-11 BRACKET 1
7 5010-404318-11 BRACKET 1
8 5010-306706-11 PAN,DRAIN 1
9 5010-101124-11 COVER 1
10 5010-308904-11 BLOCK 1
11 5010-308910-11 BRACKET 1
12 5010-101517-11 BASE 1
13 5003-200010-11 PLATE,COOL 1
14 5010-307207-11 PLATE 1
15 5010-303511-11 PLATE 1
16 5010-403503-11 PLATE 1
18 5010-407044-11 BRACKET 1
19 5010-202632-11 PIPE 1
20 5010-308907-11 SEAT 1
21 5010-405219-11 TUBE 1
22 5041-000255-12 CABLE ASSY 1717319-7 (ADH EXT #01) 1
23 5086-400795-11 CABLE,ADH SIG #01 1
24 5086-400798-11 SENSOR,PRESS ADH VAC #01 1
27 5086-401787-12 CABLE,ADH EXT #04 1
28 5086-402006-11 CABLE,GND ADH #02 1
29 5014-000001-11 ACOUSTIC UNIT REX-B875-CS1 1
30 5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) 1
31 5044-000007-11 PCB,I/F TMB2101(BOARD,CONN HPB #01) 1
32 5041-000228-11 CABLE ASSY 1717338-1 (DC ADH PWR #01) 1
33 5041-000232-11 CABLE ASSY 1717320-1 (ADH EMO #01) 1
34 5086-400802-11 CABLE,ADH EMO #02 1
35 5086-401627-11 CABLE,GND ADH #01 1
36 5010-407045-11 BRACKET 2
37 5010-402221-11 HOLDER 1
101 028-004347-1 FITTING,TUBE KJL06-01S 3
102 028-004353-1 FITTING,TUBE KJU06-00 1
103 028-017536-1 FITTING,TUBE IN-233-1369 1
104 024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 6
106 5012-000021-11 SOLENOID VALVE SS5Y3-03-X1236 1
108 5012-000069-11 AIR OPERATION VALVE AMG01-8BUR-X0421-TC 1
110 028-003337-1 FITTING,TUBE M-5H-4 3
111 028-003338-1 FITTING,TUBE M-5HL-4 3
112 020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE 3
114 044-000044-1 SUPPORT,PCB EM-3 8
115 026-006336-1 SPACER FWSSS-D5-V3-T1.3 2
201 020-001178-1 CAP SCREW M3*30 SUS304 4
202 020-000517-1 CAP SCREW M3*3 SUS304 16
203 020-001186-1 CAP SCREW M3*35 SUS304 4
204 020-000042-1 CAP SCREW M4*20 SUS304 2
206 020-000005-1 CAP SCREW M3*6 SUS304 10
207 020-000028-1 CAP SCREW M4*6 SUS304 8
208 020-000032-1 CAP SCREW M4*10 SUS304 13
209 020-002601-1 BAIND SCREW M3*4 SUS304 4
210 028-002157-1 FITTING,TUBE F900-F-9.52 1
211 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS30
212 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER
Assembly Part No: 5085-407301-12 COVER(HP) ASSY
1 5010-309431-11 COVER 1
2 5010-307203-11 COVER 1
3 5010-309407-11 COVER 1
4 5010-307205-11 COVER 1
5 5010-405349-11 BRACKET 1
6 5010-405797-11 BRACKET 1
201 020-002601-1 BAIND SCREW M3*4 SUS304 6
202 020-000518-1 CAP SCREW M3*4 SUS304 8
203 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 2
Assembly Part No: 5085-402644-12 PLATE(ADH) ASSY
1 5010-402349-11 GUIDE 6
2 5043-000005-12 HOT PLATE NGT12-HP(ADH)-FCJ 1
201 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS3044
Assembly Part No: 5085-411882-11 PLATE(200-ADH) ASSY
1 5010-402349-11 GUIDE 6
101 5043-000010-11 HOT PLATE NGT12-8-ADH-FCJ 1
201 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304
Assembly Part No: 5085-407298-13 CHAMBER(ADH) ASSY
1 5010-101192-11 CHAMBER 1
2 5010-202745-11 NOZZLE 1
3 5010-404889-11 PLATE 1
4 5010-202646-11 BRACKET 1
5 5010-405338-11 SHAFT 4
6 5010-405339-11 COLLAR 4
7 5010-401175-11 PLATE 4
8 5010-405602-11 SPACER 4
9 5010-405340-11 BRACKET 1
10 5010-202627-11 ARM(L) 1
11 5010-203123-11 ARM(R) 1
12 5010-309220-11 BRACKET(R) 1
13 5010-309221-11 BRACKET(L) 1
14 5010-407238-11 PLATE 2
15 5010-405691-11 BRACKET 1
16 5010-405729-11 BLOCK 1
101 027-000088-1 O-RING BYTON AS568-023 BLACK 1
102 5036-000001-11 #MAGNET TZ-0082 1
201 020-000020-1 CAP SCREW M3*20 SUS304 6
202 020-000417-1 CAP SCREW M2*10 SUS304 2
203 020-000028-1 CAP SCREW M4*6 SUS304 6
204 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 8
207 020-001116-1 CAP SCREW M5*8 SUS304 4
208 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 10
Assembly Part No: 5085-408278-14 COVER(ADH)ASSY,BACK
1 5010-307662-11 BASE,PANEL 1
2 5010-306689-11 PANEL 1
3 5010-306690-11 PLATE,NUT 1
4 5010-306691-11 PLATE,NUT 1
5 5010-307111-11 PACKING 1
6 5010-405584-11 LEVER 2
7 5010-406153-11 BASE,HOLDER 1
8 5010-406150-11 HOLDER 1
9 5010-406148-11 PACKING 1
10 5010-406149-11 PACKING 1
11 5010-308897-11 PANEL 1
101 026-007272-1 SPACER FWSSS-D5-V3-T1.5 5
102 020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P02872
103 026-002709-1 HANDLE A-67 1
201 020-000005-1 CAP SCREW M3*6 SUS304 2
202 020-000518-1 CAP SCREW M3*4 SUS304 4
203 020-002603-1 BIND SCREW M3*10 SUS304 13
204 020-000414-1 CAP SCREW M2*4 SUS304 2
206 020-000034-1 CAP SCREW M4*12 SUS304 2
This TEL Tokyo Electron ADH Adhesion Process Station is used working surplus. The physical condition is good, but there are signs of previous use and handling.
Sale Details
Item Condition:
Used Working, 90 Day Warranty
Estimated Packed Shipping Dimensions:
L x W x H = 32"x24"x20" @ 100 lbs.
Only items pictured are included:
If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
For items with multiple quantities:
The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
Items are sold with a
90-Day Satisfaction Guarantee
Lister 12